quadrupole residual gas analyzer

См. также в других словарях:

• Residual gas analyzer — A residual gas analyzer (RGA) is a small and usually rugged mass spectrometer, typically designed for process control and contamination monitoring in the semiconductor industry. Utilizing quadrupole technology, there exists two implementations,… …   Wikipedia

• mass spectrometry — or mass spectroscopy Analytic technique by which chemical substances are identified by sorting gaseous ions by mass using electric and magnetic fields. A mass spectrometer uses electrical means to detect the sorted ions, while a mass spectrograph …   Universalium

• RFQ Beam Coolers — RFQ stands for Radio Frequency Quadrupole (also known as a Quadrupole mass analyzer when used as a mass filter), an instrument that is used in mass spectrometry. The RFQ was invented by Prof. Wolfgang Paul in the late 50 s / early 60 s at the… …   Wikipedia